Touchdown is the Only Finite Time Singularity in a Three-Dimensional MEMS Model
[La désactivation est la seule singularité en temps fini possible dans un modèle de MEMS tridimensionnel]
Annales mathématiques Blaise Pascal, Tome 27 (2020) no. 1, pp. 65-81.

Nous montrons que la désactivation est la seule singularité en temps fini pouvant se produire dans un problème à frontière libre décrivant un microsystème électromécanique tridimensionnel. La démonstration repose sur la structure variationnelle du modèle et utilise les propriétés régularisantes du semi-groupe engendré dans L 1 par le bi-Laplacien avec conditions aux bords encastrées.

Touchdown is shown to be the only possible finite time singularity that may take place in a free boundary problem modeling a three-dimensional microelectromechanical system. The proof relies on the energy structure of the problem and uses smoothing effects of the semigroup generated in L 1 by the bi-Laplacian with clamped boundary conditions.

Publié le :
DOI : 10.5802/ambp.391
Classification : 35K91, 35R35, 35M33, 35Q74, 35B44
Keywords: Microelectromechanical system, quenching, free boundary problem, bi-Laplacian
Mot clés : Microsystème électromécanique, désactivation, problème à frontière libre, bi-Laplacien
Laurençot, Philippe 1 ; Walker, Christoph 2

1 Institut de Mathématiques de Toulouse, UMR 5219 Université de Toulouse, CNRS 31062 Toulouse Cedex 9, France
2 Leibniz Universität Hannover Institut für Angewandte Mathematik Welfengarten 1 30167 Hannover, Germany
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Laurençot, Philippe; Walker, Christoph. Touchdown is the Only Finite Time Singularity in a Three-Dimensional MEMS Model. Annales mathématiques Blaise Pascal, Tome 27 (2020) no. 1, pp. 65-81. doi : 10.5802/ambp.391. http://www.numdam.org/articles/10.5802/ambp.391/

[1] Amann, Herbert Nonhomogeneous linear and quasilinear elliptic and parabolic boundary value problems, Function spaces, differential operators and nonlinear analysis (Friedrichroda, 1992) (Teubner-Texte zur Mathematik), Volume 133, Teubner, 1993, pp. 9-126 | DOI | MR

[2] Amann, Herbert Linear and quasilinear parabolic problems. Vol. I. Abstract linear theory, Monographs in Mathematics, 89, Birkhäuser, 1995, xxxvi+335 pages | DOI | MR

[3] Bernstein, David H.; Guidotti, Patrick; Pelesko, John A. Analytical and numerical analysis of electrostatically actuated MEMS devices, Proceedings of Modeling and Simulation of Microsystems 2000, San Diego, CA, 2000, pp. 489-492

[4] Escher, Joachim; Laurençot, Philippe; Walker, Christoph Finite time singularity in a free boundary problem modeling MEMS, C. R. Math. Acad. Sci. Paris, Volume 351 (2013) no. 21-22, pp. 807-812 | DOI | MR

[5] Esposito, Pierpaolo; Ghoussoub, Nassif; Guo, Yujin Mathematical analysis of partial differential equations modeling electrostatic MEMS, Courant Lecture Notes in Mathematics, 20, Courant Institute of Mathematical Sciences; American Mathematical Society, 2010, xiv+318 pages | MR | Zbl

[6] Fargas Marquès, A.; Costa Castelló, R.; Shkel, A. M. Modelling the electrostatic actuation of MEMS: state of the art 2005 (2005) (Technical Report, Universitat Politècnica de Catalunya)

[7] Flores, G.; Mercado, G.; Pelesko, John A.; Smyth, N. Analysis of the dynamics and touchdown in a model of electrostatic MEMS, SIAM J. Appl. Math., Volume 67 (2007) no. 2, pp. 434-446 | DOI | MR | Zbl

[8] Guidetti, Davide On elliptic problems in Besov spaces, Math. Nachr., Volume 152 (1991), pp. 247-275 | DOI | MR

[9] Guidetti, Davide On interpolation with boundary conditions, Math. Z., Volume 207 (1991) no. 3, pp. 439-460 | DOI | MR

[10] Guo, Yujin; Pan, Zhenguo; Ward, Michael J. Touchdown and pull-in voltage behavior of a MEMS device with varying dielectric properties, SIAM J. Appl. Math., Volume 66 (2005) no. 1, pp. 309-338 | DOI | MR

[11] Laurençot, Philippe; Walker, Christoph A free boundary problem modeling electrostatic MEMS: I. Linear bending effects, Math. Ann., Volume 360 (2014) no. 1-2, pp. 307-349 | DOI | MR

[12] Laurençot, Philippe; Walker, Christoph On a three-dimensional free boundary problem modeling electrostatic MEMS, Interfaces Free Bound., Volume 18 (2016) no. 3, pp. 393-411 | DOI | MR

[13] Laurençot, Philippe; Walker, Christoph A variational approach to a stationary free boundary problem modeling MEMS, ESAIM, Control Optim. Calc. Var., Volume 22 (2016) no. 2, pp. 417-438 | DOI | MR

[14] Laurençot, Philippe; Walker, Christoph Some singular equations modeling MEMS, Bull. Am. Math. Soc., Volume 54 (2017) no. 3, pp. 437-479 | DOI | MR

[15] Laurençot, Philippe; Walker, Christoph Heterogeneous dielectric properties in models for microelectromechanical systems, SIAM J. Appl. Math., Volume 78 (2018) no. 1, pp. 504-530 | DOI | MR

[16] Lions, Jacques-Louis; Magenes, Enrico Problèmes aux limites non homogènes et applications. Vol. 1, Travaux et Recherches Mathématiques, 17, Dunod, 1968, xx+372 pages | MR

[17] Nečas, Jindřich Direct methods in the theory of elliptic equations, Springer Monographs in Mathematics, Springer, 2012, xvi+372 pages (Translated from the 1967 French original by Gerard Tronel and Alois Kufner, Editorial coordination and preface by Šárka Nečasová and a contribution by Christian G. Simader) | DOI | MR

[18] Pelesko, John A. Mathematical modeling of electrostatic MEMS with tailored dielectric properties, SIAM J. Appl. Math., Volume 62 (2001/02) no. 3, pp. 888-908 | DOI | MR

[19] Pelesko, John A.; Bernstein, David H. Modeling MEMS and NEMS, Chapman & Hall/CRC, 2003, xxiv+357 pages | MR | Zbl

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